Office of Director
Vacuum Technology Group
(Chief Technology Director: Chi-Chung Kei, Deputy Technology Director: Chien-Nan Hsiao)
Vacuum Instrument and Metrology Division
Advanced Process and Equipment Development Division
Intelligent Coating Equipment Technology Division
Optical Technology Group
(Chief Technology Director: Blake Chen)
Precision Optics Manufacturing Technology Division
Intelligent Optical Inspection Technology Division
Sensing & Spectroscopy Imaging Technology Division
Biomedical Chip and System Integration Technology Group
(Chief Technology Director: Kuo-Cheng Huang, Deputy Technology Director: Min-Wei Hung )
Biomedical Platform and Incubation Services Division
Biomedical Instrumentation Development Division
Organ-on-a-Chip Fabrication and Verification Division
Strategic Planning & Services
Services & Promotion Division